Selection of recent papers
A full list of papers can be downloaded here
► Continuously operating biosensor and its integration into a hermetically sealed implant
M. Birkholz, P. Glogener, F. Glös, T. Basmer, L. Theuer
micromachines 7(10) (2016) 183
► Technology modules from micro- and nanoelectronics for the life sciences
M. Birkholz, A. Mai, C. Wenger, C. Meliani, R. Scholz
WIREs Nanomedicine and Nanobiotechnology 8 (2016) 355 - 377
► System integration of a silicone-encapsulated glucose sensor implantat
M. Birkholz, P. Glogener, T. Basmer, F. Glös,
D. Genschow, C. Welsch, R. Ruff, K. P. Hoffmann
Biomedical Technology 59 (2014) S1089 - S1092
► Modeling the Shape of Ions in Pyrite-Type Crystals
M. Birkholz
crystals 4 (2014) 390 - 403
► Sensing glucose concentrations at GHz frequencies with a fully embedded Biomicro-electromechanical system (BioMEMS)
M. Birkholz, K.-E. Ehwald, T. Basmer, P. Kulse, C. Reich,
J. Drews, D. Genschow, U. Haak, S. Marschmeyer, E. Matthus
K. Schulz, D. Wolansky, W. Winkler, T. Guschauski, R. Ehwald
Journal of Applied Physics 113 (2013) 244904
► Alignment of MG-63 Osteoblasts on
Fibronectin-Coated Phosphorous Doping Lattices in Silicon
A. Körtge, S. Stählke, R. Lange, M. Birkholz
M. Fraschke, K. Schulz, B. Nebe, P. Elter
World Academy of Science, Engineering and Technology 73 (2013) 801 - 804
► Energy budget of an implantable glucose measuring system
T. Basmer, D. Genschow, M. Fröhlich, M. Birkholz
Biomedical Technology 57 (2012) 259 - 262
► Biostability of an implantable glucose sensor chip
M. Fröhlich, M. Birkholz, K.-E. Ehwald, P. Kulse, O. Fursenko, J. Katzer
IOP Conference Series: Materials Science and Engineering 41 (2012) 012022
► Ultrathin TiN membranes as a Technology Platform
for CMOS-integrated MEMS and BioMEMS Devices
M. Birkholz, K.-E. Ehwald, P. Kulse, J. Drews, M. Fröhlich,
U. Haak, M. Kaynak, E. Matthus, K. Schulz, D. Wolansky
Advanced Functional Materials 21 (2011) 1652 - 1656
► Corrosion-resistant metal layers
from a CMOS process for bioelectronic applications
M. Birkholz, K.-E. Ehwald, D. Wolansky, I. Costina,
C. Baristiran-Kaynak, M. Fröhlich, H. Beyer, A. Kapp, F. Lisdat
Surface and Coatings Technology 204 (2010) 2055 – 2059
► A thin film approach to protein crystallography
M. Birkholz
Nuclear Instruments & Methods in Physics B 268 (2010) 414 – 419
► Separation of extremely miniaturized medical sensors by IR laser dicing
M. Birkholz, K.-E. Ehwald, M. Kaynak,
T. Semperowitsch, B. Holz, S. Nordhoff
Journal of Optoelectronic and Advanced Materials 12 (2010) 479 – 483